Device and process for treating substrates in a fluid container
US6270585A · kind A · utility
2Cited by
3References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 19, 1999 |
| Grant date | Aug 7, 2001 |
| Priority date | — |
| Expiry date | Mar 19, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for handling substrates in a fluid container are provided. Even large substrates receive a particularly reliable support by means of at least one support strip that can be placed upon the upper edge portion of the substrates, and in particular in such a way that the support strip does not come into contact with treatment fluid in the tank.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.