Chip interconnection structure using stub terminals
US6271059A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 1999 |
| Grant date | Aug 7, 2001 |
| Priority date | — |
| Expiry date | Jan 4, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for fabricating a connector structure for interconnecting integrated circuit chips. The method includes the steps of patterning, masking and etching a substrate to form protrusions on the top and/or bottom surfaces of the substrate. Then the protrusions are preferentially etched to form truncated protrusions. An integrated circuit chip having pads on its surface is then joined to the top and/or bottom sides of the substrate. The protrusions and pads are coated with an electrically conductive metal. The substrate and the integrated circuit chips are joined and aligned together such that the truncated protrusions mate with the pads. Metal-coated vias are formed through the substrate to electrically connect the integrated circuit chips on the surfaces of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.