Film forming apparatus
US6273955A · kind A · utility
29Cited by
10References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 1996 |
| Grant date | Aug 14, 2001 |
| Priority date | — |
| Expiry date | Aug 28, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A film forming apparatus for forming a plurality of films on a substrate through a continuous process, comprising a plurality of vacuum chambers in communication to each other via connection, at least vacuum chamber having internally a treatment detachable from the vacuum chamber for fulfilling a predetermined treatment on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.