Patent · US Expired

Micropolarimeter and ellipsometer

US6275291A · kind A · utility

22Cited by

9References

15Claims

0Family size

Assignee

Nanophotonics Co., Ltd. · DE

Inventors

Michael Abraham · Mainz, DE
Matthias Eberhardt · Lörzweiler, DE

Key dates

Filing date	Sep 16, 1999
Grant date	Aug 14, 2001
Priority date	—
Expiry date	Sep 16, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/214
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micropolarimeter and ellipsometer for obtaining complete optical information of superficially illuminated specimens. A compact construction is designed to facilitate their use. To obtain the simultaneous surface measurement of all optical information from a specimen, the retarder of the micropolarimeter consists of a one-piece retarder array with at least one pixel group, in which the major axis orientations of the individual pixels are distributed over an angular range of 360.degree.. This micropolarimeter can be integrated into the reflected light microscope of an ellipsometer. The result is a compact measurement unit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.