Closed chamber method and apparatus for the coating of liquid films
US6277442A · kind A · utility
6Cited by
13References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 1999 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Nov 1, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The described invention provides a method and apparatus for coating uniform films on substrates and curing the coatings on the surface. Within an enclosed chamber the object to be coated is positioned and a sufficient amount of liquid material is provided into the chamber to cover the surface of the object to be coated. The excess liquid material is then evacuated from the chamber at a controlled rate to leave a coating of material on the surface of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.