Method and apparatus for measuring dimensions of a feature of a specimen
US6278114A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 2, 1998 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Nov 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2814
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope for measuring a dimension of a feature of a specimen includes a focusing lens for focusing an electron beam onto the specimen and a supplying circuit for supplying an exciting current supplied to the focusing lens. A control circuit controls the supplying circuit to vary the exciting current which is supplied to the focusing lens and obtains dimension data of a feature of the specimen at each of the exciting currents which is supplied to the focusing lens. An actual dimension of the feature is determined based on the obtained dimension data. Further, a profile of the feature may be determined based on the changes observed in the dimension data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.