High efficiency replicated x-ray optics and fabrication method
US6278764A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 22, 1999 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Jul 22, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Replicated x-ray optics are fabricated by sputter deposition of reflecting layers on a super-polished reusable mandrel. The reflecting layers are strengthened by a supporting multilayer that results in stronger stress-relieved reflecting surfaces that do not deform during separation from the mandrel. The supporting multilayer enhances the ability to part the replica from the mandrel without degradation in surface roughness. The reflecting surfaces are comparable in smoothness to the mandrel surface. An outer layer is electrodeposited on the supporting multilayer. A parting layer may be deposited directly on the mandrel before the reflecting surface to facilitate removal of the layered, tubular optic device from the mandrel without deformation. The inner reflecting surface of the shell can be a single layer grazing reflection mirror or a resonant multilayer mirror. The resulting optics can be used in a wide variety of applications, including lithography, microscopy, radiography, tomography, and crystallography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.