Organic titanium compound suitable for MOCVD
US6280518A · kind A · utility
6Cited by
1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 1999 |
| Grant date | Aug 28, 2001 |
| Priority date | — |
| Expiry date | Jan 15, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Bis(dipivaloylmethanato)diisobutoxytitanium or bis(dipivaloylmethanato)-di(2,2-dimethyl-1-propoxytitanium per se, or as used as a raw material in a MOCVD process, as is or as a solution in an organic solvent, for example, tetrahydrofuran, produces a dielectric thin film of a fine texture having a film thickness which is proportional to the deposition time and the concentration of the solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.