Inventor · Ibaraki, JP

Atsushi Itsuki

10Patents
3h-index
7Co-inventors
53Inventor score

Filing activity: Dec 27, 1995 → Feb 5, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5696384A Composition for formation of electrode pattern Electricity 29 Expired
US5767302A High-purity TI complexes, methods for producing the same and BST film-forming liquid compositions Electricity 12 Expired
US6280518A Organic titanium compound suitable for MOCVD Chemistry; Metallurgy 6 Expired
US7196211B2 Hafnium-containing material for film formation, method for producing the same, and method for producing hafnium-containing thin film using the same Chemistry; Metallurgy 3 Expired
US6310228A Organic copper compound, liquid mixture containing the compound, and copper thin-film prepared using the solution Emerging Cross-Sectional Technologies 3 Expired
US7148367B2 Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same Chemistry; Metallurgy 3 Expired
US6355097B2 Organic titanium compound suitable for MOCVD Chemistry; Metallurgy 2 Expired
US6485554B1 Solution raw material for forming composite oxide type dielectric thin film and dielectric thin film Chemistry; Metallurgy 1 Expired
US11566326B2 Vaporizable source material container and solid vaporization/supply system using the same Electricity 0 Active
US11613809B2 Solid vaporization/supply system of metal halide for thin film deposition Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.