Quartz glass crucible for pulling silicon single crystal and production process for such crucible
US6280522A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 29, 2000 |
| Grant date | Aug 28, 2001 |
| Priority date | — |
| Expiry date | Mar 29, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S65/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is provided a quartz glass crucible for pulling a silicon single crystal and a production process for the crucible, wherein an inner surface of the crucible is crystallized without addition of impurities during pulling a silicon single crystal, thereby impurities serving as causes of crystal defects being not incorporated into the silicon single crystal, so that deterioration of its inner surface is suppressed to improve a crystallization ratio, and accordingly productivity of the quartz glass crucible as well as a quality of the silicon single crystal is improved, and the quartz glass crucible for pulling a silicon single crystal comprises a crucible base body (3) made of a translucent quartz glass layer and a synthetic quartz glass layer (4) formed on an inner wall surface of the crucible base body (3), wherein a portion encircled by a brown ring on an inner surface of the quartz glass crucible is uniformly crystallized during pulling the silicon single crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.