Anti-reflective coatings for spatial light modulators
US6282010A · kind A · utility
309Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 6, 1999 |
| Grant date | Aug 28, 2001 |
| Priority date | — |
| Expiry date | May 6, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133502
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator with an anti-reflective coating (ARC) 100 integrated into its structure. The manufacturing of the device is altered to include deposition of an ARC 100, and any necessary patterning and etching to allow the elements of the array to operate properly. The ARC could reside in several places of the element structure including over the addressing circuitry 26, over a middle layer 32 or on the underside of the reflective structure 10. Micromechanical spatial light modulators, as well as non-moving modulators, such as reflective and transmissive LCD modulators can use the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.