Color filters formed on integrated circuits
US6285065A · kind A · utility
19Cited by
7References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 19, 1999 |
| Grant date | Sep 4, 2001 |
| Priority date | — |
| Expiry date | Apr 19, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8053
Abstract
Light transmitting filter elements are formed in holes etched in a covering passivation layer overlying light sensing devices formed in an integrated circuit. Filter material is spun on to the wafer to fill the etched holes. The filter material is cured and etched back below the passivation layer top surface. Subsequent filter materials transmitting different light frequencies may be similarly spun on to fill subsequently etched holes, cured, and etched back to form additional filter elements. A contiguous structure of individual filter elements may be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.