Patent · US Expired

Low-cost photoplastic cantilever

US6291140A · kind A · utility

18Cited by

5References

21Claims

0Family size

Assignee

Olaf Ohlsson · BE

Inventors

Cornel Andreoli · Grabs, CH
Jürgen Brugger · Neukirch, DE
Ute Dreschler · Adliswil, CH
Peter Vettiger · Thalwil, CH

Key dates

Filing date	Apr 28, 1999
Grant date	Sep 18, 2001
Priority date	—
Expiry date	Apr 28, 2019

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/879
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of manufacturing a cantilever with tip comprising the steps of forming a tip-like indent in a substrate, depositing a photoresist layer which fills said tip-like indent and covers at least a part of said substrate, and photolithographically structuring said photoresist layer to form said cantilever with tip out of said photoresist.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.