Glass-like insulator for electrically isolating electrodes from ion implanter housing
US6291828A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1999 |
| Grant date | Sep 18, 2001 |
| Priority date | — |
| Expiry date | Dec 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/04924
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic quadrupole lens assembly (60) is provided for an ion implanter (10) having an axis (86) along which an ion beam passes, comprising: (i) four electrodes (84a-84d) oriented radially outward from the axis (86), approximately 90.degree. apart from each other, such that a first pair of electrodes (84a and 84c) oppose each other approximately 180.degree. apart, and a second pair of electrodes (84b and 84d) also oppose each other approximately 180.degree. apart; (ii) a housing (62) having a mounting surface (64) for mounting the assembly (60) to the implanter, the housing at least partially enclosing the four electrodes (84a-84d); (iii) a first electrical lead (104) for providing electrical power to the first pair of electrodes (84a and 84c); (iv) a second electrical lead (108) for providing electrical power to the second pair of electrodes (84b and 84d); and (v) a plurality of electrically insulating members (92) formed of a glass-like material, comprising at least a first electrically insulating member for attaching the first pair of electrodes (84a and 84c) to the housing, and at least a second electrically insulating member for attaching the second pair of electrodes …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.