Zhimin Wan
57Patents
5h-index
78Co-inventors
75Inventor score
Filing activity: Dec 21, 1999 → Apr 15, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9450078B1 | Forming punch-through stopper regions in finFET devices | Electricity | 13 | Active |
| US6918351B2 | Apparatus for ion beam implantation | Electricity | 7 | Expired |
| US6806479B1 | Apparatus and method for reducing implant angle variations across a large wafer for a batch disk | Electricity | 7 | Expired |
| US6291828A | Glass-like insulator for electrically isolating electrodes from ion implanter housing | Electricity | 7 | Expired |
| US6579420B2 | Apparatus and method for uniformly depositing thin films over substrates | Chemistry; Metallurgy | 5 | Expired |
| US7750323B1 | Ion implanter and method for implanting a wafer | Electricity | 5 | Active |
| US9852887B2 | Ion source of an ion implanter | Electricity | 4 | Active |
| US11521914B2 | Microelectronic assemblies having a cooling channel | Electricity | 4 | Active |
| US8673753B1 | Multi-energy ion implantation | Electricity | 4 | Active |
| US11387224B2 | Phase change material in substrate cavity | Emerging Cross-Sectional Technologies | 4 | Active |
| US11646244B2 | Socket loading mechanism for passive or active socket and package cooling | Electricity | 3 | Active |
| US9340870B2 | Magnetic field fluctuation for beam smoothing | Electricity | 2 | Active |
| US7745804B1 | Ion implantation method and application thereof | Electricity | 2 | Active |
| US9057129B2 | Implant method and implanter by using a variable aperture | Electricity | 2 | Active |
| US7807986B1 | Ion implanter and method for adjusting ion beam | Electricity | 2 | Active |
| US8835882B2 | Real time monitoring ion beam | Electricity | 1 | Active |
| US8653807B2 | Apparatus and method for measuring ion beam current | Physics | 1 | Active |
| US8334517B2 | Apparatus for adjusting ion beam by bended bar magnets | Electricity | 1 | Active |
| US8941077B2 | Deceleration apparatus for ribbon and spot beams | Electricity | 1 | Active |
| US9431247B2 | Method for ion implantation | Electricity | 1 | Active |
| US9697988B2 | Ion implantation system and process | Electricity | 1 | Active |
| US11456232B2 | Thermal assemblies for multi-chip packages | Electricity | 1 | Active |
| US11901262B2 | Cooling solution including microchannel arrays and methods of forming the same | Electricity | 0 | Active |
| US12308299B2 | TEC-embedded dummy die to cool the bottom die edge hotspot | Electricity | 0 | Active |
| US8907301B1 | Gas mixture method for generating ion beam | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.