Micromachined two dimensional array of piezoelectrically actuated flextensional transducers
US6291927A · kind A · utility
35Cited by
13References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1998 |
| Grant date | Sep 18, 2001 |
| Priority date | — |
| Expiry date | Jun 15, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.