Gas panel
US6293310A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 1997 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Oct 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.