Surface-tracking measuring machine
US6295866A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1999 |
| Grant date | Oct 2, 2001 |
| Priority date | — |
| Expiry date | Aug 26, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface-tracking measuring machine is provided, in which measurement range is enlarged while keeping a measuring force, responsivity, resolution thereof. For the object, the surface-tracking measuring machine has a frame (10), a probe (11) swingably supported by the frame (10) and having a tracer (15) at an end thereof, a measuring force controller (21) for controlling the measuring force applied to the probe, a displacement detector (31) for detecting a displacement of the probe, a measuring force detector (41) for detecting the measuring force applied to the probe, and a controller (51) for comparing a measuring force detected value detected by the measuring force detector and a previously commanded measuring force command value and to control the measuring force controller so that the measuring force detected value is equal to the measuring force command value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.