Characteristic-evaluating storage capacitors
US6300647A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1999 |
| Grant date | Oct 9, 2001 |
| Priority date | — |
| Expiry date | Dec 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for capacitor characteristic evaluation is provided, which enables measurement of the characteristic of a capacitor immediately after the completion of its formation processes, and which improves the fabrication yield. This device is comprised of (a) a conductive region formed on a semiconductor substrate; (b) an interlayer dielectric layer formed to cover the conductive layer; (c) a first electrode formed on the interlayer dielectric layer; (d) a second electrode formed on the interlayer dielectric layer to be apart from the first electrode; the second electrode being electrically connected to the first electrode through the conductive region; (e) a capacitor dielectric formed to cover the first and second electrodes; the capacitor dielectric being contacted with the first and second electrodes; (f) a third electrode formed on the capacitor dielectric to be opposite to the first electrode via the capacitor dielectric; (g) a fourth electrode formed on the capacitor dielectric to be apart from the third electrode to be opposite to the second electrode via the capacitor dielectric; (h) the first electrode, capacitor dielectric, and third electrode constitute a first capacito…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.