transportation and active temperature control of integrated circuits for test
US6304093A · kind A · utility
7Cited by
36References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1999 |
| Grant date | Oct 16, 2001 |
| Priority date | — |
| Expiry date | Dec 2, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2867
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A handler for a device under test ("DUT") includes a rotating table which supports up to eight DUTs. The DUTs are held in place over openings in the table and separate heat exchangers contact the individual DUTs through the openings and conductively control the temperature of the DUTs. Six of the DUTs are in conditioning stations and are lifted off of the rotary table until they contact separate spring-loaded pads. One of the DUTs is in a test station and it is lifted off of the rotary table until it contacts a test head, at which point testing is performed. The temperature of each of the DUTs is controlled throughout the process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.