Scanning framing blade apparatus
US6307619A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2000 |
| Grant date | Oct 23, 2001 |
| Priority date | — |
| Expiry date | Mar 23, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K7/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning framing blade apparatus includes a stationary assembly having a plurality of magnets; first and second carriage assemblies that each have a plurality of coils. The first and second carriage assemblies are supported on the stationary assembly by a plurality of air bearings that permit the first and second carriage assemblies to move in only one degree of freedom. In addition, the scanning framing blade apparatus includes first and second framing blades that are attached to the first and second carriage assemblies, respectively. The scanning framing blade apparatus also includes a controller that is coupled to the plurality of coils. The controller is adapted to energize at least one of the plurality of coils, thereby causing at least one of the carriage assemblies and corresponding framing blade to move in the one degree. This motion controls illumination onto a reticle during a substrate scanning process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.