Organic copper compound, liquid mixture containing the compound, and copper thin-film prepared using the solution
US6310228A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2000 |
| Grant date | Oct 30, 2001 |
| Priority date | — |
| Expiry date | Dec 15, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
An organic copper compound is provided that is represented by the following formula (1) in which monovalent copper is coordinated with a .beta.-diketone compound and an unsaturated hydrocarbon compound having a silyloxy group: ##STR1## wherein R Is an unsaturated hydrocarbon moiety, L is the .beta.-diketone compound, X.sub.1, X.sub.2, and X.sub.3 are each a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or an alkoxy group having 1 to 4 carbon atoms, and X.sub.1, X.sub.2, and X.sub.3 may be the same or different from each other. The organic copper compound is barely decomposed in a stock solution before use, has a prolonged storage life, exhibits a high film deposition rate, can be effectively decomposed on a substrate, is highly volatile, and exhibits high adhesiveness to an underlayer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.