Micro machined mirror
US6315423A · kind A · utility
45Cited by
6References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 1999 |
| Grant date | Nov 13, 2001 |
| Priority date | — |
| Expiry date | Jul 13, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/1821
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro machined mirror assembly is provided that includes a micro machined top cap, mirror, and bottom cap mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the z-direction. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.