Method and apparatus for conditioning the atmosphere in a process chamber
US6316045A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2000 |
| Grant date | Nov 13, 2001 |
| Priority date | — |
| Expiry date | Jul 12, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86139
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.