Roland Bernard
14Patents
5h-index
13Co-inventors
55Inventor score
Filing activity: Jan 19, 2000 → May 24, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6316045A | Method and apparatus for conditioning the atmosphere in a process chamber | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6910497B2 | Semiconductor component manufacturing plant with ventilated false floor | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6643014B2 | Method and a system for identifying gaseous effluents, and a facility provided with such a system | Physics | 11 | Expired |
| US6422823B1 | Mini-environment control system and method | Mechanical Engineering; Lighting; Heating | 10 | Expired |
| US6649019B2 | Apparatus for conditioning the atmosphere in a vacuum chamber | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7572110B2 | Pumping apparatus using thermal transpiration micropumps | Mechanical Engineering; Lighting; Heating | 4 | Expired |
| US7694700B2 | Apparatus for transporting substrates under a controlled atmosphere | Emerging Cross-Sectional Technologies | 4 | Active |
| US6402479B1 | Apparatus for pumping out transfer chambers for transferring semiconductor equipment | Chemistry; Metallurgy | 4 | Expired |
| US7350544B2 | Station for controlling and purging a mini-environment | Electricity | 2 | Expired |
| US7515687B2 | Compact source with very bright X-ray beam | Electricity | 2 | Active |
| US7735648B2 | Transport pod with protection by the thermophoresis effect | Emerging Cross-Sectional Technologies | 1 | Active |
| US7219692B2 | Apparatus for conditioning the atmosphere in a chamber | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8151816B2 | Method and device for removing pollution from a confined environment | Emerging Cross-Sectional Technologies | 1 | Active |
| US7998426B2 | Plasma-based gas treatment system integrated in a vacuum pump | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.