Corrosion-resistant system and method for a plasma etching apparatus
US6316369A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2000 |
| Grant date | Nov 13, 2001 |
| Priority date | — |
| Expiry date | Mar 30, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32477
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A corrosion-resistant system and method for a plasma etching apparatus are provided which are capable of reducing a corrosion or erosion phenomenon of a discharge tube, equipment and/or elements in a chamber of the plasma etching apparatus which is used for localized etching. A micro wave M is oscillated from a micro wave oscillator 20 toward a mixed gas of CF.sub.4 and O.sub.2 in a quartz discharge tube 110 to thereby produce plasma discharge. The micro wave oscillator 20 is controlled in an on-off manner by means of a pulse generator 21, to thereby oscillate a pulsed micro wave M. As a result, it is possible to reduce the erosion of the quartz discharge tube 110 caused by an active species gas G generated by the plasma discharge. Preferably, a corrosion-resistant oil A is filled in the chamber 100 for preventing an X-Y drive mechanism 130, etc., therein from being corroded or eroded by the active species gas G diffusing in the chamber 100.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.