Nanoporous silica treated with siloxane polymers for ULSI applications
US6318124A · kind A · utility
60Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 1999 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Aug 23, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S65/11
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A surface-coated nanoporous silica dielectric film that is prepared by a process comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric film with a coating composition comprising a polymer precursor, under conditions effective to form a strength-enhancing and/or hydrophobicity enhancing layer on the treated nanoporous silica dielectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.