Inventor · Fremont, CA, US

James Drage

33Patents
16h-index
23Co-inventors
77Inventor score

Filing activity: May 8, 1989 → Apr 5, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6318124A Nanoporous silica treated with siloxane polymers for ULSI applications Emerging Cross-Sectional Technologies 60 Expired
US6042994A Nanoporous silica dielectric films modified by electron beam exposure and having low dielectric constant and low water content Electricity 45 Expired
US6037275A Nanoporous silica via combined stream deposition Electricity 44 Expired
US6495479B1 Simplified method to produce nanoporous silicon-based films Emerging Cross-Sectional Technologies 43 Expired
US6208014A Use of multifunctional reagents for the surface modification of nanoporous silica films Emerging Cross-Sectional Technologies 42 Expired
US6368400B1 Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 40 Expired
US6605362B2 Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 24 Expired
US6410149B1 Silane-based nanoporous silica thin films and precursors for making same Emerging Cross-Sectional Technologies 23 Expired
US6489030B1 Low dielectric constant films used as copper diffusion barrier Emerging Cross-Sectional Technologies 22 Expired
US6395651B1 Simplified process for producing nanoporous silica Emerging Cross-Sectional Technologies 21 Expired
US6372666B1 Process for producing dielectric thin films Electricity 20 Expired
US6126733A Alcohol based precursors for producing nanoporous silica thin films Emerging Cross-Sectional Technologies 18 Expired
US6589889B2 Contact planarization using nanoporous silica materials Physics 18 Expired
US6090448A Polyol-based precursors for producing nanoporous silica thin films Electricity 17 Expired
US7029826B2 Method to restore hydrophobicity in dielectric films and materials Emerging Cross-Sectional Technologies 16 Expired
US6518205B1 Multifunctional reagents for the surface modification of nanoporous silica films Emerging Cross-Sectional Technologies 16 Expired
US6770572B1 Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films Electricity 15 Expired
US6503850B1 Process for producing nanoporous dielectric films at high pH Electricity 15 Expired
US5858547A Novolac polymer planarization films for microelectronic structures Emerging Cross-Sectional Technologies 15 Expired
US6495906B2 Simplified process for producing nanoporous silica Emerging Cross-Sectional Technologies 14 Expired
US4942147A Catalyst system containing an autoacceleration inhibitor Emerging Cross-Sectional Technologies 14 Expired
US6914114B2 Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography Emerging Cross-Sectional Technologies 13 Expired
US6559071B2 Process for producing dielectric thin films Electricity 11 Expired
US6319855A Deposition of nanoporous silic films using a closed cup coater Electricity 11 Expired
US6670022B1 Nanoporous dielectric films with graded density and process for making such films Emerging Cross-Sectional Technologies 9 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.