James Drage
33Patents
16h-index
23Co-inventors
77Inventor score
Filing activity: May 8, 1989 → Apr 5, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6318124A | Nanoporous silica treated with siloxane polymers for ULSI applications | Emerging Cross-Sectional Technologies | 60 | Expired |
| US6042994A | Nanoporous silica dielectric films modified by electron beam exposure and having low dielectric constant and low water content | Electricity | 45 | Expired |
| US6037275A | Nanoporous silica via combined stream deposition | Electricity | 44 | Expired |
| US6495479B1 | Simplified method to produce nanoporous silicon-based films | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6208014A | Use of multifunctional reagents for the surface modification of nanoporous silica films | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6368400B1 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6605362B2 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6410149B1 | Silane-based nanoporous silica thin films and precursors for making same | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6489030B1 | Low dielectric constant films used as copper diffusion barrier | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6395651B1 | Simplified process for producing nanoporous silica | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6372666B1 | Process for producing dielectric thin films | Electricity | 20 | Expired |
| US6126733A | Alcohol based precursors for producing nanoporous silica thin films | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6589889B2 | Contact planarization using nanoporous silica materials | Physics | 18 | Expired |
| US6090448A | Polyol-based precursors for producing nanoporous silica thin films | Electricity | 17 | Expired |
| US7029826B2 | Method to restore hydrophobicity in dielectric films and materials | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6518205B1 | Multifunctional reagents for the surface modification of nanoporous silica films | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6770572B1 | Use of multifunctional si-based oligomer/polymer for the surface modification of nanoporous silica films | Electricity | 15 | Expired |
| US6503850B1 | Process for producing nanoporous dielectric films at high pH | Electricity | 15 | Expired |
| US5858547A | Novolac polymer planarization films for microelectronic structures | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6495906B2 | Simplified process for producing nanoporous silica | Emerging Cross-Sectional Technologies | 14 | Expired |
| US4942147A | Catalyst system containing an autoacceleration inhibitor | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6914114B2 | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6559071B2 | Process for producing dielectric thin films | Electricity | 11 | Expired |
| US6319855A | Deposition of nanoporous silic films using a closed cup coater | Electricity | 11 | Expired |
| US6670022B1 | Nanoporous dielectric films with graded density and process for making such films | Emerging Cross-Sectional Technologies | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.