Robots for microelectronic workpiece handling
US6318951A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Nov 20, 2001 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An improved conveyor system for transporting a microelectronic workpiece within a processing tool is set forth. The conveyor system includes a transport unit slidably guided on a conveyor rail for transporting and manipulating the workpieces. The transport unit includes a vertical member which is connected to a base end of a two section robot arm. The robot arm includes an end effector at a distal end thereof which is actuated to grip a surrounding edge of a workpiece. A first rotary actuator is arranged to rotate the vertical member about its axis to rotate the entire robot arm. A second rotary actuator is positioned to rotate the second section of the robot arm, via a belt, with respect to the first section of the robot arm. A third rotary actuator is arranged to rotate the end effector about its horizontal axis. The third rotary actuator permits the end effector to flip the microelectronic workpiece between a face up and a face down orientation. In a further aspect of the invention, two transport units are mounted to slide laterally on the conveyor rail. The transport units include a vertical space between respective end effectors and the first sections of the robot arms to allo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.