Method for forming a high surface area trench capacitor

US6319787A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Gerhard Enders · Glen Allen, US
• Matthias Ilg · Fishkill, US
• Dietrich Widmann · Unterhaching, DE

Key dates

• Filing date: Jun 30, 1998
• Grant date: Nov 20, 2001
• Expiry date: Jun 30, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/37

Abstract

A trench capacitor having a substrate with a trench extending therein with a nested, e.g., concentric, conductive regions disposed within the trench. A dielectric material is disposed within the substrate. The dielectric material has portions thereof disposed between the concentric conductive regions to dielectrically electrically separate one of the conductive regions from another one of the conductive regions. The dielectrically separated conductive regions provide a pair of electrodes for the capacitor. Selected ones of the concentric conductive regions are electrically connected to provide one of the electrodes for the capacitor. The substrate has a conductive region therein and one of the concentric conductive regions providing one of the electrodes is electrically connected to the conductive region in the substrate. One of the concentric conductive regions is electrically connected to a conductive region in the substrate through a bottom portion of the trench.