Patent · US Expired

Die collet for a semiconductor chip and apparatus for bonding semiconductor chip to a lead frame

US6321971A · kind A · utility

9Cited by
15References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 13, 1998
Grant dateNov 27, 2001
Priority date
Expiry dateOct 13, 2018

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/53191
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A die collet for a semiconductor chip having an exposed electrical structure, the die collet including a body having a vacuum line connected thereto, the die collet including a plurality of parts each having a vacuum hole communicating with the vacuum line. Apparatus for bonding a semiconductor chip to a lead frame, the apparatus including a first die collet for picking up the semiconductor chip, on aligning stage for receiving the semiconductor chip from the first pickup tool and aligning the semiconductor chip. A second die collet picks up the semiconductor chip from the aligning stage and places the semiconductor chip on a lead frame. The first and second die collets are constructed as described above.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.