Vibration isolation apparatus for stage
US6327024A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2000 |
| Grant date | Dec 4, 2001 |
| Priority date | — |
| Expiry date | Apr 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vibration isolation apparatus for preventing shaking and vibration of a stage of an exposure apparatus or the like uses a vibration isolation mount formed of a spring buffer system employing a spring member and a fluid buffer system employing a viscous fluid as a vibration isolation base which is disposed between a base member on which an exposure unit is mounted and an installation surface on which the base member is installed so as to support the base member. The coefficient of viscous drag of the viscous fluid is varied to vary a damping coefficient which depends on the coefficient of viscous drag thereby to vary rigidity of the vibration isolation mount, whereby vibration transmitted from an external source and vibration associated with a stage movement are damped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.