Precision electrostatic actuation and positioning
US6329738A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2000 |
| Grant date | Dec 11, 2001 |
| Priority date | — |
| Expiry date | Mar 29, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/053
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is provided an electrostatically-controllable actuator having a stationary electrode, with an actuating element separated from the stationary electrode by an actuation gap. The actuating element includes a mechanically constrained support region, a deflection region free to be deflected through the actuation gap, and a conducting actuation region extending from about the support region to the deflection region. A commonality in area between the actuation region and the stationary electrode is selected to produce controlled and stable displacement of the deflection region over a displacement range, e.g., extending to a specified point in the actuation gap, when an actuation voltage is applied between the actuation region and the stationary electrode. This range of stable displacement, which can be stable bending, can extend to a point greater than about 1/3 of the actuation gap, or even through the full actuation gap. As a result, the invention overcomes the limitation of 1/3 gap actuation of conventional electrostatic actuation configurations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.