Radio frequency identification system and method for tracking silicon wafers
US6330971A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2000 |
| Grant date | Dec 18, 2001 |
| Priority date | — |
| Expiry date | Oct 3, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for tracking semiconductor wafers through processing operations performed at a plurality of stations. A reader reads information relating to and identifying the wafers from a tag mounted on a wafer carrier. The tag has a memory which includes a plurality of pages storing the information. A plurality of antennas are connected to the reader. The antennas each have a transmission range which defines a reader position and the reader and tag communicate by radio frequency signals via one of the antennas when the carrier is at the respective reader position. A host computer and reader communicate in accordance with an interface protocol by which the host computer commands the reader to read the stored information from one or more selected tag pages and the reader provides the stored information read from the selected tag pages to the host computer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.