Patent assignee · US · COMPANY

MEMC Electronic Materials, Inc.

328Patents
70Active
328Granted
47Portfolio score

Filing activity: Aug 14, 1991 → Apr 25, 2012 · 54 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US5518549A Susceptor and baffle therefor Electricity 536 Expired
US6330971A Radio frequency identification system and method for tracking silicon wafers Electricity 107 Expired
US5919302A Low defect density vacancy dominated silicon Emerging Cross-Sectional Technologies 72 Expired
US5976247A Surface-treated crucibles for improved zero dislocation performance Emerging Cross-Sectional Technologies 70 Expired
US5377451A Wafer polishing apparatus and method Performing Operations; Transporting 69 Expired
US5593494A Precision controlled precipitation of oxygen in silicon Electricity 57 Expired
US5605487A Semiconductor wafer polishing appartus and method Electricity 57 Expired
US5679055A Automated wafer lapping system Performing Operations; Transporting 53 Expired
US5571373A Method of rough polishing semiconductor wafers to reduce surface roughness Electricity 52 Expired
US5422316A Semiconductor wafer polisher and method Emerging Cross-Sectional Technologies 52 Expired
US5795381A SIO probe for real-time monitoring and control of oxygen during czochralski growth of single crystal silicon Physics 50 Expired
US5340437A Process and apparatus for etching semiconductor wafers Electricity 49 Expired
US5779791A Process for controlling thermal history of Czochralski-grown silicon Emerging Cross-Sectional Technologies 47 Expired
US5178720A Method for controlling oxygen content of silicon crystals using a combination of cusp magnetic field and crystal and crucible rotation rates Chemistry; Metallurgy 44 Expired
US5653799A Method for controlling growth of a silicon crystal Emerging Cross-Sectional Technologies 37 Expired
US6562123B2 Process for growing defect-free silicon wherein the grown silicon is cooled in a separate chamber Emerging Cross-Sectional Technologies 36 Expired
US6236104A Silicon on insulator structure from low defect density single crystal silicon Emerging Cross-Sectional Technologies 36 Expired
US6187089A Tungsten doped crucible and method for preparing same Emerging Cross-Sectional Technologies 36 Expired
US6454635B1 Method and apparatus for a wafer carrier having an insert Emerging Cross-Sectional Technologies 35 Expired
US5837662A Post-lapping cleaning process for silicon wafers Electricity 35 Expired
US6444027B1 Modified susceptor for use in chemical vapor deposition process Emerging Cross-Sectional Technologies 35 Expired
US6709981B2 Method and apparatus for processing a semiconductor wafer using novel final polishing method Emerging Cross-Sectional Technologies 34 Expired
US5980629A Methods for improving zero dislocation yield of single crystals Emerging Cross-Sectional Technologies 33 Expired
US6515742B1 Defect classification using scattered light intensities Physics 33 Expired
US6093913A Electrical heater for crystal growth apparatus with upper sections producing increased heating power compared to lower sections Emerging Cross-Sectional Technologies 33 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.