Evacuation system
US6332925A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 1997 |
| Grant date | Dec 25, 2001 |
| Priority date | — |
| Expiry date | May 21, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.