Air lock
US6334751B1 · kind B1 · utility
3Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1999 |
| Grant date | Jan 1, 2002 |
| Priority date | — |
| Expiry date | Nov 26, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D2099/008
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Air lock for introducing and continuously passing a strip of a substrate into and through a vacuum chamber, including an enclosure containing at least three successive rollers in the direction of travel of the strip and between which a passage is made for the strip, the first and third rollers being located on one side of this passage, the second roller being located on the opposite side of this passage, an essentially airtight region being formed between the strip and the first and third rollers and connected to a vacuum pump, a component being provided for adjusting the pressure with which the strip rests on the rollers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.