Objective lens for scanning electron microscope
US6335530B1 · kind B1 · utility
3Cited by
5References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1998 |
| Grant date | Jan 1, 2002 |
| Priority date | — |
| Expiry date | Jul 30, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an object lens of a type of generating a magnetic field of the side of a specimen and maing a principal plan of the lens close to the specimen for reducing aberration coefficients, an inner magnetic pole is formed in a shape of a cone having an angle of 30° of less to an optical axis and an outer magnetic pole is also provided inside the cone by which even the large-size specimen can be inclined up to about 60° and the large-size specimen can be observed with high resolution even when the specimen is inclined at a high angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.