Conveying system
US6336546B1 · kind B1 · utility
45Cited by
10References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 12, 2000 |
| Grant date | Jan 8, 2002 |
| Priority date | — |
| Expiry date | Jan 12, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A conveying system for transporting wafers in clean rooms, the conveying system is configured as a transporting store and connects a plurality of processing centers for processing the wafers. Secondary conveying systems branch off from the conveying system and form supply buffers. In each case one secondary conveying system leads to at least one processing center from which a predetermined number of wafers can be removed, and fed to the processing center, optionally by use of at least one handling unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.