Patent · US Expired

Method for producing single crystal and pulling device

US6340391B1 · kind B1 · utility

1Cited by
4References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 14, 2000
Grant dateJan 22, 2002
Priority date
Expiry dateAug 14, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T117/1072
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A method for producing a single crystal by pulling the single crystal with a wire according to the Czochralski method, wherein temperature around an end of joint part of the wire and a seed crystal holder is controlled so as not to exceed 1200° C., preferably 800° C., at any time, and material of the wire is one selected from tungsten, stainless steel and molybdenum, and a pulling apparatus therefor. According to the present invention, there can be provided a method in which temperature around an end of joint part of a wire and a seed crystal holder is controlled so as not to exceed a temperature at which material degradation of the wire begins during the period of from seeding to an early stage of the pulling, and a pulling apparatus therefor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.