Module appearance inspection apparatus
US6343503B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 6, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Dec 6, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67271
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A module appearance inspection apparatus includes a warpage checking unit, a visual checking unit, a first module transfer unit for unloading the module from a module tray, a second module transfer unit for transferring the module within the apparatus, and a third module transfer unit for loading the module to a module tray. The apparatus can replace the first and third module transfer units with a single module transfer unit. In this case, the apparatus includes: a warpage checking unit; a visual checking unit; a supply unit in which module trays are stacked; a storage unit in which module trays also can be stacked; a tray transfer unit which moves a module tray from the supply unit to the storage unit; a first module transfer unit which unloads and loads the module from and to the module tray on the tray transfer unit; and a second module transfer unit which transfers the module from the warpage checking unit or the visual checking unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.