Semiconductor device to be mounted on main circuit board and process for manufacturing same device
US6344695B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 8, 1999 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Oct 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor chip has an active surface with electrodes thereon and an insulating layer covering the active surface and having through holes therein through which corresponding electrodes are exposed. Rewiring circuits are formed on the insulating layer, each having a first terminal end extending through a corresponding through hole and electrically connected to a respective electrode and a second terminal end comprising a conductive pad. Respective inner bumps are formed on the second terminal ends of the rewiring circuits. An insulating film is formed on the rewiring circuits and exposed surfaces of the insulating layer and through holes are formed therein corresponding to the conductive pads and into which respective inner bumps are inserted. A respective outer bump is superimposed on each inner bump in the insulating film and projects beyond an exposed surface of the insulating film remote from the semiconductor chip. In an alternative, inner bumps are omitted and the outer bumps are directly superimposed on the conductive pads in the corresponding through holes. A method of making the semiconductor device provides for superimposing outer bumps either directly on the respect…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.