High precision positioning device and method of operating same
US6347259B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1999 |
| Grant date | Feb 12, 2002 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B19/401
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A high precision positioning device includes an end effector and a platen spaced therebelow for receiving a workpiece. One of the end effector and the platen is moveable in the X-Y plane. One of the end effector and the platen is moveable in the Z direction. The device includes senors for sensing the position of the end effector in the X, Y and Z directions relative to the platen. The apparatus includes a control system for controlling the movement of the end effector relative to the platen and adjusting the position of the end effector relative to the X. Y and Z position as sensed by the sensors. Preferably the platen is generally parallel to the X-Y plane and the Z direction is normal to the platen. Preferably the control system uses a position, velocity and acceleration control system for controlling the movement in the X and Y direction and an impedance control system for controlling the movement in the Z direction. The method of operating the high precision positioning device uses a host computer and an embedded computer. The method includes the steps of receiving and checking data; sending and decoding the checked data and determining when a move command appears; instructing …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.