Displaceable X/Y coordinate measurement table
US6347458B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 16, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Dec 16, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S269/902
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displaceable X/Y coordinate measurement table having two orthogonally arranged measurement mirrors for interferometric position determination is described. The displaceable measurement table, a mirror body carrying the measurement mirrors, and the receptacle for the substrate are embodied as separate components. The mirror body has a number of support points on its upper side and lower side for supporting a substrate or a receptacle above the upper side and for supporting the mirror body on the lower points above the measurement table. The mirror geometry is therefore unaffected by the weight of various substrates. The two measurement mirrors are integrated into a one-piece mirror body made of a material having an extremely low coefficient of thermal expansion. The described embodiments have frame-shaped openings in the X/Y coordinate measurement table and mirror body, which makes the measurement table suitable for both reflected and transmitted applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.