Heating apparatus and method
US6347535B2 · kind B2 · utility
7Cited by
5References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 20, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Apr 20, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B29/025
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
When an object to be heated is heated without temperature nonuniformity in its heated surface, unwanted thermal deformation can be suppressed, and thermal processing precision can be improved. For this purpose, a heat transfer plate for heating a plate-like object to be heated, and a base plate are stacked. A rod heater as a heat source is inserted in the heat transfer plate. The heat transfer plate has a larger thermal conductivity and smaller creep than the base plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.