Semiconductor processing reactor controllable gas jet assembly
US6347749B1 · kind B1 · utility
26Cited by
14References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2000 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Feb 9, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A gas jet assembly includes a gas injector having a longitudinal axis, a first motor coupled to the gas injector and a second motor coupled to the gas injector. The first motor controls a position of the gas injector along the longitudinal axis of the gas injector. The second motor controls the angular position of the gas injector around the longitudinal axis of the gas injector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.