Jig for producing pellicle and method for producing pellicle using the same
US6350549B1 · kind B1 · utility
7Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1999 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Aug 17, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/108
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is disclosed a jig for producing a pellicle comprising a support frame having an opening, and an adhesive layer provided at periphery of the opening, wherein the adhesive layer is composed of a polymer material having a glass transition temperature within a range of 0° C. to 300° C. The jig of the present invention can be repeatedly used without reforming the adhesive layer after use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.