Patent · US Expired

Method and apparatus for optically modulating light utilizing a resonant cavity structure

US6351326B1 · kind B1 · utility

4Cited by
27References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 14, 1999
Grant dateFeb 26, 2002
Priority date
Expiry dateDec 14, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2203/15
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical modulator that modulates an optical beam through directed through an integrated circuit die. In one embodiment, the optical beam is directed into and out of a flip chip packaged integrated circuit die. In one embodiment, the optical modulator includes a resonant cavity structure. In one embodiment, the resonant cavity structure is disposed in the dielectric layer of the integrated circuit die. In one embodiment, the optical beam is directed into the integrated circuit die and through the resonant cavity structure and is modulated in response to an integrated circuit signal of the integrated circuit die. In one embodiment, the optical beam is modulated by modulating the resonant wavelength of the resonant cavity structure in response to the integrated circuit signal. A modulated optical beam is directed from the resonant cavity structure back out of the integrated circuit die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.