Twin tower wafer boat loading system and method
US6352399B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1999 |
| Grant date | Mar 5, 2002 |
| Priority date | — |
| Expiry date | Jul 7, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for automatically and simultaneously loading a single long wafer boat or a plurality of wafer boats onto a cantilever paddle includes a stationary first track aligned with a first opening of a diffusion furnace and a first carriage moveable on the first track. The first carriage supports a cantilever paddle. A first vertical translation mechanism includes a first stationary part and a first vertically moveable support. A second vertical translation mechanism includes a second stationary part and a second vertically moveable support. A first horizontal translation mechanism includes a first base supported by the first vertically moveable support and a first horizontally moveable arm supported by the first base. A second horizontal translation mechanism includes a second base supported by the second vertically moveable support and a second horizontally moveable arm supported by the second base. A horizontal support apparatus is adapted to support the long wafer boat or plurality of wafer boats each loaded with semiconductor wafers. The support apparatus includes a first end supported by the first horizontally moveable arm and a second end supported by the second horizont…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.