Amtech Systems, LLC
74Patents
63Active
74Granted
53Portfolio score
Filing activity: May 6, 1986 → Apr 18, 2023 · 11 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5364667A | Photo-assisted chemical vapor deposition method | Chemistry; Metallurgy | 483 | Expired |
| US6061614A | Electronic tag including RF modem for monitoring motor vehicle performance | Physics | 60 | Expired |
| US5215588A | Photo-CVD system | Chemistry; Metallurgy | 45 | Expired |
| US5118286A | Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers | Mechanical Engineering; Lighting; Heating | 28 | Expired |
| US10121289B1 | Vehicle-based electronic toll system with interface to vehicle display | Physics | 26 | Active |
| US8154405B2 | RFID mutual authentication verification session | Physics | 21 | Active |
| US8188908B2 | System and method for measurement of distance to a tag by a modulated backscatter RFID reader | Physics | 19 | Active |
| US5765982A | Automatic wafer boat loading system and method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US4767251A | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes | Emerging Cross-Sectional Technologies | 16 | Expired |
| US8344886B2 | RFID vehicle tag with manually adjustable data fields | Electricity | 14 | Active |
| US6143477A | Dual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafers | Electricity | 12 | Expired |
| US5888048A | Automatic wafer boat loading | Emerging Cross-Sectional Technologies | 11 | Expired |
| US8427279B2 | Multi-protocol RFID system using bit-lock or step-lock synchronization | Physics | 11 | Active |
| US8314687B2 | Multi-protocol RFID system using bit-lock or step-lock synchronization | Physics | 9 | Active |
| US9361492B2 | Multi-protocol RFID system | Physics | 8 | Active |
| US8242890B2 | Multi-protocol RFID system using dynamic reconfiguration | Physics | 6 | Active |
| US6352399B1 | Twin tower wafer boat loading system and method | Emerging Cross-Sectional Technologies | 6 | Expired |
| US8198985B2 | Automatic mode detection in a dual operating mode RFID tag | Electricity | 6 | Active |
| US10134210B1 | Vehicle tracking system using smart-phone as active transponder | Electricity | 6 | Active |
| US9135480B2 | Multi-protocol or multi command RFID system | Physics | 5 | Active |
| US9633238B2 | RFID system with time slot interleaving | Physics | 5 | Active |
| US9785804B2 | Multi-protocol RFID system | Physics | 5 | Active |
| US9313559B2 | Automatic mode detection in a dual operating mode RFID tag | Electricity | 5 | Active |
| US6537010B2 | Wafer boat support and method for twin tower wafer boat loader | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8338211B2 | Systems and methods for charging solar cell layers | Emerging Cross-Sectional Technologies | 4 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.