Patent assignee · US · COMPANY

Amtech Systems, LLC

74Patents
63Active
74Granted
53Portfolio score

Filing activity: May 6, 1986 → Apr 18, 2023 · 11 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US5364667A Photo-assisted chemical vapor deposition method Chemistry; Metallurgy 483 Expired
US6061614A Electronic tag including RF modem for monitoring motor vehicle performance Physics 60 Expired
US5215588A Photo-CVD system Chemistry; Metallurgy 45 Expired
US5118286A Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers Mechanical Engineering; Lighting; Heating 28 Expired
US10121289B1 Vehicle-based electronic toll system with interface to vehicle display Physics 26 Active
US8154405B2 RFID mutual authentication verification session Physics 21 Active
US8188908B2 System and method for measurement of distance to a tag by a modulated backscatter RFID reader Physics 19 Active
US5765982A Automatic wafer boat loading system and method Emerging Cross-Sectional Technologies 17 Expired
US4767251A Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes Emerging Cross-Sectional Technologies 16 Expired
US8344886B2 RFID vehicle tag with manually adjustable data fields Electricity 14 Active
US6143477A Dual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafers Electricity 12 Expired
US5888048A Automatic wafer boat loading Emerging Cross-Sectional Technologies 11 Expired
US8427279B2 Multi-protocol RFID system using bit-lock or step-lock synchronization Physics 11 Active
US8314687B2 Multi-protocol RFID system using bit-lock or step-lock synchronization Physics 9 Active
US9361492B2 Multi-protocol RFID system Physics 8 Active
US8242890B2 Multi-protocol RFID system using dynamic reconfiguration Physics 6 Active
US6352399B1 Twin tower wafer boat loading system and method Emerging Cross-Sectional Technologies 6 Expired
US8198985B2 Automatic mode detection in a dual operating mode RFID tag Electricity 6 Active
US10134210B1 Vehicle tracking system using smart-phone as active transponder Electricity 6 Active
US9135480B2 Multi-protocol or multi command RFID system Physics 5 Active
US9633238B2 RFID system with time slot interleaving Physics 5 Active
US9785804B2 Multi-protocol RFID system Physics 5 Active
US9313559B2 Automatic mode detection in a dual operating mode RFID tag Electricity 5 Active
US6537010B2 Wafer boat support and method for twin tower wafer boat loader Emerging Cross-Sectional Technologies 4 Expired
US8338211B2 Systems and methods for charging solar cell layers Emerging Cross-Sectional Technologies 4 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.